Inventory
List of FIB and FIB SEM instruments, accessories, availability, and contact information. To add your institution to the list, please contact us.
Army Research Laboratory, Aberdeen
FEI Nova NanoLab 600
HW:
Sirion FEG SEM
Sidewinder ion column (2 KV – 30 KV, 21 nA)
Detectors: ETD, TLD, CDEM
GIS: Pt
Autoprobe 200
SW:
Auto Slice&View
AutoTEM
AutoFIB
Analytical Tools:
Oxford Si-Li EDS
Oxford/ HKL EBSD
Contact
Brian Schuster
Access
Collaborators And Gov’t Organizations, US Citizens Only
Applications
Semiconductor Device + Material Characterization And Failure Analysis
SEM Cross-Section Snd TEM Sample Prep
Device Modification Of MEMS And Electro-Optic Devices
Brookhaven National Laboratory, Center for Functional Nanomaterials
HW:
DualBeam (SEM/FIB)
Detectors: ETD, TLD, STEM
GIS: Pt, TEOS
Omniprobe
Evactron in-situ plasma cleaning
SW:
Nanometer Pattern Generator System (NPGS)
LabVIEW (for in-situ electrical measurements)
Oxford Instruments INCA for microanalysis
Analytical Tools:
Oxford Instruments SiLi EDS Detector
Contact
Access
Collaborators And Gov’t Organizations, US Citizens Only
Applications
Semiconductor Device + Material Characterization And Failure Analysis
SEM Cross-Section Snd TEM Sample Prep
Device Modification Of MEMS And Electro-Optic Devices
Carnegie Institution of Washington, Geophysical Laboratory / Department of Terrestrial Magnetism
FEI Helios G4 PFIB UXe
HW:
FEI Vion Xe Plasma ion column (current range 1pA to 2.5uA)
Elstar 2 electron column (with monochromator)
Detectors: ETD, TLD, ABS, CBS, ICE, ICD, STEM
EasyLift in-situ micromanipulator
Two single port GIS: W, Dx
FEI/Quorum CryoMAT cold stage
Piezo stage
Charge neutralizer
Quick loader
SW:
FEI xT UI
Auto Slice and View 4.1
AutoTEM 4 / Guided Workflow
Avizo
iFast Developer’s Kit
Contact
Access
Collaborators
Applications
TEM sample preparation of geological and planetary materials
Slice and view / 3D tomography of geological and planetary materials
Large area cross sections of recovered diamond anvil cell (DAC) / high pressure experiments
Diamond milling / inclusion extraction
Cryo milling of beam sensitive / biological materials
Metrology
Imaging (SEM resolution 0.6 nm, FIB resolution 15 nm)
College of Staten Island, City University of New York, Nanotechnology Research Laboratory
Micrion 2500
HW:
Ion column (Ga LMIS, 50kV, 1pA – 45nA)
Detectors: MCP, SE/SI
Etching Gases: H2O, Os, XeF2
Deposition: W(CO)6, TMCTS
Contact
Access
Open to outside users, industrial and academic
Applications
Nanomachining, Cross-Sectioning, Diamond Micromachining, Gas-Assisted Etching and Deposition, Custom Aperture Machining
Drexel University, Centralized Research Facility
FEI DB235
HW:
Sirion FEG SEM
Detectors: SED, TLD, CDEM
GIS: Pt
Autoprobe 100
SW:
FEI Auto Applications
Analytical Tools:
iXRF, EDS, XRF
Contact
Access
Outside academic and industrial users welcome
Applications
characterization, fabrication, TEM sample prep
George Washington University, GW Nanofabrication and Imaging Center
FEI Helios NanoLab 660 DualBeam FIB SEM
HW:
Elstar electron column
Tomahawk ion column
Detectors: TLD (SE and BSED), SED, ICD, Mirror
Integrated plasma cleaner
STEM
GIS: Insulator Dep, Insulator Etch, W, Pt
SW:
AutoSlice&View
MAPS
NanoBuilder
iFast Developers Kit
Analytical Tools:
EasyLift Nanomanipulator
EDAX Octane Pro with Team Basic
Contact
Access
Located in the Nanofabrication and Imaging Center. Fee for Service/Usage with current prices available upon request. Open to internal and external academic and industry users.
Applications
SEM imaging while FIB milling, SEM cross-section, TEM sample preparation, Microanalysis, Materials research, Biological 3D image reconstruction, Characterization
Johns Hopkins University, Materials Characterization and Processing (MCP) Core Facility
HW:
Tomahawk ion column
FEG SEM
Detectors: ETD, TLD, CDEM
GIS: Pt, C
SW:
AutoSlice&View
AutoTEM
AutoFIB
Analytical Tools:
EBSD
Contact
Access
Outside academic and industrial users welcome
Applications
characterization, fabrication, TEM sample prep
Lehigh University, Center for Advanced Materials and Nanotechnology (CAMN)
FEI Scios FIB SEM
HW:
Tomahawk ion column (2 kV – 30 kV, 65 nA)
Nicole FEG SEM
Detectors: ETD, TLD (T1 & T2), SE/ICE
GIS: Pt
FEI EasyLift
Integrated plasma cleaner
SW:
Auto Slice and View G3
Auto TEM G2
FEI Movie Creator
Drift Correction
Contact
Access
User Facility
Applications
Cross-sectional imaging, TEM sample prep, micro/nanomachining
National Institute of Standards and Technology, Center for Nanoscale Science and Technology (CNST)
FEI Helios 660 NanoLab
HW:
Tomahawk ion column (2 kV – 30 KV, 65 nA)
Elstar FEG SEM
Detectors: ETD, TLD, MD, ICD, SE/ICE, STEM
Deposition: Pt, C, SiO2(TEOS)
Etching: H2O, XeF2
Omniprobe Autoprobe liftout tool
Integrated plasma cleaner
SW:
Amira
Avizo Fire
AutoFIB (macro recorder)
AutoProbe (Omniprobe)
Auto Slice and View G3
Drift Correction
AutoTEM G2
FEI Movie Creator
Aztec (Oxford simultaneous EDS & EBSD)
EBS3 (3D acquisition of EBSD maps)
Nano Builder
Analytical Tools:
Oxford X-Max80 SDD EDS
Oxford NordlysMax2 EBSD
Contact
Access
User facility
Applications
Cross-sectional imaging, TEM sample prep, micro/nanomachining, compositional analysis/mapping, 3D tomography
National Institute of Standards and Technology, Center for Nanoscale Science and Technology (CNST)
FEI Helios 660 NanoLab
HW:
Tomahawk ion column (2 kV – 30 KV, 65 nA)
Elstar FEG SEM
Detectors: ETD, TLD, MD, ICD, SE/ICE, STEM
Deposition: Pt, W, Au, SiO2
Etching: H2O, XeF2
Omniprobe Autoprobe liftout tool
Integrated plasma cleaner
SW:
Amira
Avizo Fire
AutoFIB (macro recorder)
AutoProbe (Omniprobe)
Auto Slice and View G3
Drift Correction
AutoTEM G2
FEI Movie Creator
Kleindiek iProbe
Nano Builder
iFast
Analytical Tools:
Kleindiek Micromanipulator (x4) with Ro Tip, MicroTweezers,
and dedicated electrical feedthrough for low noise
measurements
Contact
Access
User facility
Applications
TEM sample prep, micro/nanomachining, in-situ electrical measurement, circuit editing, nanophotonic structure fabrication
National Institute of Standards and Technology, Materials Measurement Science Division
FEI Helios 660 NanoLab
HW:
Tomahawk ion column (2 kV – 30 KV, 65 nA)
Elstar FEG SEM
Detectors: ETD, TLD, MD, ICD, SE/ICE, STEM
Deposition: Pt, C, SCE
EasyLift
Quorum Polaron Cryo system
Gatan MonoCL4
SW:
AutoSlice&View
AutoFIB
AutoTEM
EBS3
EDS3
iFAST
MAPS
Analytical Tools:
EDAX Apex EDS System, Octane Plus SDD (30mm2)
EDAX Apex EBSD System, Hikari Pro
Oxford Aztec EDS System, XMax Extreme Windowless SDD
(100 mm2)
Contact
Access
Internal Use
Applications
Biological room temp and cryogenic 3D imaging and analysis, APT & TEM sample prep, microanalysis, particle analysis
National Institute of Standards and Technology, Physical Measurement Laboratory
FEI Helios 600 NanoLab
HW:
Sidewinder ion column (4 nm resolution at 1 pA)
Helios FEG SEM (better than 1 nm resolution)
Detectors: ETD, TLD, STEM, STEM II
GIS: Pt
Quorum Polaron Cryo system
Laser interferometer stage
drift and vibration compensation
38 pm resolution
SW:
AutoSlice&View
AutoFIB
Analytical Tools:
Bruker XFlash SDD system
Contact
Access
Collaborators
Applications
Metrology
Naval Research Laoratory, Materials Science and Technology Division
FEI Nova 600 NanoLab
HW:
Sidewinder ion column (2 KV – 30 KV, 21 nA)
Sirion FEG SEM
Detectors: ETD, TLD, Removable STEM
GIS: Pt, Selective Carbon Etch, Enhanced Etch, Carbon Dep
Raith E-beam/I-beam writer (Nanolithography tool)
Ascend Micromanipulator
SW:
HKL Suite
Auto Slice and View
AutoTEM
Alicona Stereo Imaging
EDS3
iFAST
Analytical Tools:
Oxford SDD
HKL EBSD/Forward Scatter Diode Detectors (ECCI)
Contact
Rhonda Stroud
Access
Collaborators
Applications
EBSD/EDS/image mapping/reconstruction, TEM sample preparation, nanowire research, patterning/device design, defect analysis, ECCI imaging of dislocations/crystal defects
Penn State, Materials Research Institute, Materials Characterization Laboratory
FEI Quanta 200 3D
HW:
Magnum ion column (5-7 nm resolution, 5–30 kV)
W SEM (3.5 nm resolution at 30 kV)
Quorum Polarprep Cryo Transfer System
GIS: W, Pt
Omniprobe
SW:
AutoSlice&View
AutoFIB
AutoTEM
Contact
Access
Shared-use facility; academic and industrial collaborations as well
Applications
TEM sample preparation, cryo-TEM specimen prep and cross sectioning, rapid prototyping
Stevens Institute of Technology, Laboratory for Multiscale Imaging
Zeiss Auriga CrossBeam
HW:
Cobra ion column (2.5 nm at 30 kV, current 1 pA to 50 nA)
Gemini FEG Column (1 nm at 15 kV & 1.9 nm at 1 kV)
Detectors: STEM, ETD, in-lens SE, in-lens EsB
Charge compensator
Leica VCT-100 cryo-transfer system
MED20 freeze fracture/coating system
GIS: Pt
Kleindiek MM3A manipulator
NPGS E-beam amd I-beam lithography system
Analytical Tools:
Oxford INCA X-sight SDD (80mm2)
Contact
Access
Shared-use facility; academic and industrial collaborations as well
Applications
TEM sample preparation, EM cryo-techniques, materials research
University of Maryland at College Park, Advanced Imaging & Microscopy Laboratory
Tescan GAIA FIB SEM
HW:
FEG-SEM
Detectors: SE, BSE, STEM
5-GIS system
Omniprobe nanomanipulator
Analytical Tools:
EDS
EBSD
TOF-SIMS
Contact
Access
Shared-use facility; academic and industrial collaborations as well
Applications
TEM sample preparation, material characterization, nanomachining
University of Maryland at College Park, Advanced Imaging & Microscopy Laboratory
Tescan XEIA Plasma FIB SEM
HW:
Xe Plasma source
FEG-SEM
5-GIS system
Analytical Tools:
EDS
CL
Contact
Access
Shared-use facility; academic and industrial collaborations as well
Applications
Material characterization, nanomachining
FEI Nova NanoLab 600
HW:
Sidewinder ion column (2 kV – 30 kV, ~20 nA)
FEG SEM
Detectors: ETD, TLD, CDEM, Retractable STEM
GIS: Pt, SCE, TEOS, IEE (XeF2)
Quorum Polarprep Cryo Transfer System
Evactron in situ plasma cleaning
Omniprobe Autoprobe 200
SW:
FEI auto routines
Nabity Nanometer Pattern Generator System
3D EBSD
Simultaneous EDS and EBSD acquisition
Analytical Tools:
EDAX TSL EBSD with FSD
EDAX SDD EDS detector with TEAM software
Contact
Access
User facility; Outside academic and industrial users welcome
Applications
TEM sample preparation, Semiconductor device characterization, rewiring, failure analysis, fabrication, lithography, cryoFIB
Yale University, Aberration-Corrected Electron Microscopy (ACEM) Core
TFS Helios G4 UX
HW:
Phoenix Ga+ ion column (500 V – 30 kV, 0.1 pA to 65 nA)
Elstar electron column with monochromator
Detectors: ETD, TLD, ICE
GIS: Pt, C
SW:
AutoSlice&View/ AutoTEM/NanoBuilder/EBL
Analytical Tools:
EDS/EBSD
Contact
Access
User facility; Outside academic and industrial users welcome
Applications
Characterization, fabrication, TEM sample prep, EBL